LASER-SCRIBING PLATFORM

Laser-scribing systems and translation stages operable to support a workpiece during laser scribing are provided. A laser-scribing system includes a base section, a bed supported by the base section, a laser, a first driving mechanism operable to move a workpiece longitudinally along the bed, and a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KRISHNASWAMI SRIRAM, JOHNSTON BEJAMIN M, SHAMOUN BASSAM, FAN JIAFA, KURITA SHINICHI, WHITE JOHN M, HUANG INCHEN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Laser-scribing systems and translation stages operable to support a workpiece during laser scribing are provided. A laser-scribing system includes a base section, a bed supported by the base section, a laser, a first driving mechanism operable to move a workpiece longitudinally along the bed, and a second driving mechanism. The bed comprises a movable section configured to translate with respect to the base section. The movable section comprises a gap to allow a laser beam to pass through. The laser is positioned to direct the laser beam through the gap. The second driving mechanism is operable to laterally translate the laser and the movable section in order to scribe a pattern on the workpiece.