Method for manufacturing Chalcogenide devices

A method of chalcogenide device formation includes treatment of the surface upon which the chalcogenide material is deposited. The treatment reduces or eliminates native oxides and other contaminants from the surface, thereby increasing the adhesion of the chalcogenide layer to the treated surface,...

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Bibliographische Detailangaben
Hauptverfasser: FOURNIER JEFF, NUSS ROBERT, LOWREY TYLER, WICKER GUY, REED JAMES, KOSTYLEV SERGEY, SPALL ED, SCHELL CARL, RICKER JIM, SANDOVAL REGINO, CZUBATYJ WOLODYMYR
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of chalcogenide device formation includes treatment of the surface upon which the chalcogenide material is deposited. The treatment reduces or eliminates native oxides and other contaminants from the surface, thereby increasing the adhesion of the chalcogenide layer to the treated surface, eliminating voids between the chalcogenide layer and deposition surface and reducing the degradation of chalcogenide material due to the migration of contaminants into the chalcogenide.