INSPECTION APPARATUS AND INSPECTION METHOD

Inspection apparatus and method adapted to inspect a sample by irradiating it with an electron beam and detecting defects on the sample from an image formed based on a secondary signal generated from the sample. The inspection apparatus includes: a scanning deflector for scanning the sample with a b...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NOJIRI MASAAKI, HAYAKAWA KOICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	Inspection apparatus and method adapted to inspect a sample by irradiating it with an electron beam and detecting defects on the sample from an image formed based on a secondary signal generated from the sample. The inspection apparatus includes: a scanning deflector for scanning the sample with a beam having an irradiation energy for imaging irradiation regions of the sample, a blanking deflector for blanking the beam to prevent it from irradiating the sample during scanning, a moving stage for continuously moving the sample during scanning such that the beam is deflected and scanned continuously from one side of the sample to the other, and a controller for sending a deflection command to the blanking deflector to blank the beam over nonirradiation regions of the scanning regions of the sample according to selection of irradiation regions of the sample.