Fluid Control Device

There is provided a fluid control device having no dead volume. A fluid flow path is constituted by a loop-shaped flow-path portion L, and a first inlet flow-path portion B1, a second inlet flow-path portion B2 and a common outlet flow-path portion B3 which are communicated with a first inlet A1, a...

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1. Verfasser: KOYOMOGI MUTSUNORI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:There is provided a fluid control device having no dead volume. A fluid flow path is constituted by a loop-shaped flow-path portion L, and a first inlet flow-path portion B1, a second inlet flow-path portion B2 and a common outlet flow-path portion B3 which are communicated with a first inlet A1, a second inlet A2 and a common outlet A3 at predetermined portions P1, P2 and P3 of the loop-shaped flow-path portion L. There are provided a first shut-off valve V1 for opening and closing the first inlet flow-path portion B1 and a second shut-off valve V2 for opening and closing the second inlet flow-path portion B2. Accordingly, the first fluid which has flowed into the first inlet A1 and reached the loop-shaped flow-path portion L and the second fluid which has flowed into the second inlet A2 and reached the loop-shaped flow-path portion L are flowed through the loop-shaped flow-path portion L such that each of the first and second fluids are divided into two parts and thereafter are ejected from the common outlet A3.