REFLECTIVE PLANAR LIGHTWAVE CIRCUIT WAVEGUIDE

REFLECTIVE PLANAR LIGHTWAVE CIRCUIT WAVEGUIDE

A method of making a planar lightwave circuit (PLC) waveguide capable of being integrated with a surface-mounted component is presented. The method entails etching a silicon substrate to form a slanted wall, forming a nonreflective waveguide portion on the silicon substrate, and depositing a reflect...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIANG RAY, SUN JACOB, CHEN TED, WEI HONGZHEN, LIN WENHUA
Format: Patent
Sprache:eng
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:A method of making a planar lightwave circuit (PLC) waveguide capable of being integrated with a surface-mounted component is presented. The method entails etching a silicon substrate to form a slanted wall, forming a nonreflective waveguide portion on the silicon substrate, and depositing a reflective layer on the slanted wall. Light travels through the nonreflective waveguide portion in substantially a first direction, and the light from the nonreflective waveguide portion strikes the reflective layer to be redirected in a second direction. The second direction may be the direction toward the surface-mounted component. A PLC waveguide device made with the above method is also presented.