Magnetic thin film and thin film magnetic device
A magnetic thin film includes: a first magnetic film formed on a substrate; and a second magnetic film formed on the first magnetic film. The first magnetic film is a soft magnetic film having magnetic permeability higher than that of the second magnetic film. The second magnetic film is an iron-bas...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A magnetic thin film includes: a first magnetic film formed on a substrate; and a second magnetic film formed on the first magnetic film. The first magnetic film is a soft magnetic film having magnetic permeability higher than that of the second magnetic film. The second magnetic film is an iron-based soft magnetic film. Thickness ratio between the first magnetic film and the second magnetic film (=thickness of the first magnetic film/thickness of the second magnetic film) lies in a range of 0.005 to 0.030 both inclusive. |
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