EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION

EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION

Effluent gas from a polysilicon reactor is directed to a gas separation membrane with a permeate gas being recycled to the reactor and the retentate being chilled with a cryogenic condenser using liquid cryogen. Liquid cryogen vaporized by the hot effluent gas may be stored or used to seal and/or ch...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: BRATT SHAWN, GADRE SARANG
Format: Patent
Sprache:eng
Schlagworte:
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Beschreibung
Zusammenfassung:Effluent gas from a polysilicon reactor is directed to a gas separation membrane with a permeate gas being recycled to the reactor and the retentate being chilled with a cryogenic condenser using liquid cryogen. Liquid cryogen vaporized by the hot effluent gas may be stored or used to seal and/or chill the reactor or blanket a Si feed to a SiHCl3 reactor.