Hydrogen-containing carbon film

To provide a hydrogen-containing carbonaceous membrane having a novel property. For example, the hydrogen-containing carbonaceous membrane may be effectively prevented from delamination from a substrate. A hydrogen-containing carbonaceous membrane includes carbon and hydrogen. The membrane has a hyd...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ODA KAZUHIKO, MATSUURA TAKASHI, USHIRO TOSHIHIKO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:To provide a hydrogen-containing carbonaceous membrane having a novel property. For example, the hydrogen-containing carbonaceous membrane may be effectively prevented from delamination from a substrate. A hydrogen-containing carbonaceous membrane includes carbon and hydrogen. The membrane has a hydrogen content of more than 50 atomic percent and less than 65 atomic percent and a density of more than 1.3 g/cm3 and less than 1.5 g/cm3. Another hydrogen-containing carbonaceous membrane has a hydrogen content of more than 0 atomic percent and less than 50 atomic percent and a density of more than 1.4 g/cm3 and less than 1.9 g/cm3.