SCANNING PROBE MICROSCOPE AND MEASURING METHOD THEREBY

A scanning probe microscope performs first scanning movement of a probe in X and Y directions along a sample surface while controlling the position of the probe in a Z direction by an XYZ fine movement mechanism. Measurement information about the sample surface is obtained by a measurement section a...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	MURAYAMA KEN
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A scanning probe microscope performs first scanning movement of a probe in X and Y directions along a sample surface while controlling the position of the probe in a Z direction by an XYZ fine movement mechanism. Measurement information about the sample surface is obtained by a measurement section and displacement detection section during the first scanning. A probe movement path is determined for a second scanning that includes a measuring spot in which a measurement including a parallel direction component to the sample surface to be performed on the probe movement path is determined, on the basis of the measurement information about the sample surface. As a result of performing the measurement including the parallel direction component based on the second scanning wear of the probe is reduced and measurement reliability and simplified movement control of the scanning of the probe is enabled.