Sacrificial Compositions And Methods Of Fabricating A Structure Using Sacrificial Compositions

Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.

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Bibliographische Detailangaben
Hauptverfasser: BIDSTRUP-ALLEN SUE, WHITE CELESTA E, JOSEPH PAUL JAYACHANDRAN, KOHL PAUL A, REED HOLLIE, HENDERSON CLIFFORD
Format: Patent
Sprache:eng
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Zusammenfassung:Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.