APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE AND METHOD THEREOF

An apparatus for fabricating a semiconductor device and method thereof are disclosed, by which an angle of light diffracted by a reticle can be decreased in a manner of filling up an empty space between a reticle and a frame with a transparent substance of high purity to maximize real resolution on...

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Bibliographische Detailangaben
1. Verfasser:	LEE DONGAN
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An apparatus for fabricating a semiconductor device and method thereof are disclosed, by which an angle of light diffracted by a reticle can be decreased in a manner of filling up an empty space between a reticle and a frame with a transparent substance of high purity to maximize real resolution on and/or over a semiconductor wafer.