Passivation of Vertical Cavity Surface Emitting Lasers

Passivation of Vertical Cavity Surface Emitting Lasers

A vertical cavity surface emitting laser including a substrate, a plurality of epitaxial layers formed on the substrate as an epitaxial stack, and a passivation layer at least partly covering the epitaxial stack including a plurality of sublayers at least some of which are composed of different mate...

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1. Verfasser: LI NEIN-YI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A vertical cavity surface emitting laser including a substrate, a plurality of epitaxial layers formed on the substrate as an epitaxial stack, and a passivation layer at least partly covering the epitaxial stack including a plurality of sublayers at least some of which are composed of different materials. The composition and thicknesses of the sublayers are chosen to minimise the overall stress of the passivation layer and thereby to increase a mean time before the vertical surface emitting laser fails.