WORKPIECE LOADING SYSTEM

A wafer loading system accommodates sufficient wafer carriers to substantially maximize the processing speed capability of wafer processing systems. Wafer carriers are placed into and removed from the loading system by one or two overhead carrier loading elements, such as overhead track systems. Car...

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Bibliographische Detailangaben
Hauptverfasser:	EUDY STEVE L, WIRTH PAUL Z, HARRIS RANDY A
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAULING HOISTING HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDEDFOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCEDIRECTLY TO THE SURFACE OF A LOAD LIFTING PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A wafer loading system accommodates sufficient wafer carriers to substantially maximize the processing speed capability of wafer processing systems. Wafer carriers are placed into and removed from the loading system by one or two overhead carrier loading elements, such as overhead track systems. Carriers may be loaded or removed while other carriers are in work. One or more transfer robots may move wafers from the carriers to buffers. Methods of operating the loading system allow delivery and removal of wafers to and from the processing systems to meet or exceed the processing speeds of the processing systems.