Design Rule Checking System

In a design rule checking system for checking whether or not an integrated circuit design complies with design rules specifying limit values for respective geometric parameters, non-binary functions are used to model the way in which systematic yield loss varies with the value of the geometric param...

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Bibliographische Detailangaben
1. Verfasser:	CAZEAUX LIONEL RIVIERE
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	In a design rule checking system for checking whether or not an integrated circuit design complies with design rules specifying limit values for respective geometric parameters, non-binary functions are used to model the way in which systematic yield loss varies with the value of the geometric parameters. This enables a value to be assigned to systematic yield loss in cases where the geometric parameter is compliant with the design rule but takes a value close to the design rule limit.