Methods for manufacturing fluid-filled mems displays

This invention relates to methods of manufacturing fluid-filled MEMS displays, where the fluid is sealed in the display assembly and substantially surrounds the moving components of the display to reduce the effects of stiction and to improve the optical and electromechanical performance of the disp...

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Hauptverfasser:	FIJOL JOHN J, STEYN JASPER LODEWYK, HAGOOD NESBITT W
Format:	Patent
Sprache:	eng
Schlagworte:	LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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Beschreibung
Zusammenfassung:	This invention relates to methods of manufacturing fluid-filled MEMS displays, where the fluid is sealed in the display assembly and substantially surrounds the moving components of the display to reduce the effects of stiction and to improve the optical and electromechanical performance of the display.