Microsystem and Method for Positioning a Second Element with Respect to a First Element in a Microsystem

A microsystem, comprising a first static element ( 1 ), a second, movable and unattached element ( 2 ), an actuator ( 3 ) for effecting a force between the first and the second element ( 1, 2 ), which actuator ( 3 ) is designed for controlling a temperature (T 1 , T 2 ) of one of the first element (...

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Bibliographische Detailangaben
Hauptverfasser:	DESPONT MICHEL, DURIG URS T, GOTSMANN BERND
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS TRANSPORTING
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Beschreibung
Zusammenfassung:	A microsystem, comprising a first static element ( 1 ), a second, movable and unattached element ( 2 ), an actuator ( 3 ) for effecting a force between the first and the second element ( 1, 2 ), which actuator ( 3 ) is designed for controlling a temperature (T 1 , T 2 ) of one of the first element ( 1 ) and the second element ( 2 ). A corresponding method for positioning a second element ( 2 ) with respect to a first element ( 1 ) in a microsystem is introduced.