PLASMA INSENSITIVE HEIGHT SENSING

PLASMA INSENSITIVE HEIGHT SENSING

A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, a first signal at a first frequency, and measuring, at the first or second piece, a second signal at a second frequency. The second frequency is different from the first fre...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CONNALLY WILLIAM J, GARG SANJAY
Format: Patent
Sprache:eng
Schlagworte:
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING DISTANCES, LEVELS OR BEARINGS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Beschreibung
Zusammenfassung:A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, a first signal at a first frequency, and measuring, at the first or second piece, a second signal at a second frequency. The second frequency is different from the first frequency. The distance is determined based on the measured first and second signals.