High-efficiency, low-debris short-wavelength light sources

This invention relates generally to short-wavelength radiation from laser-produced and discharged produced plasmas, and more particularly to efficient systems and methods for obtaining short-wavelength radiation.

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Bibliographische Detailangaben
1. Verfasser: MACFARLANE JOSEPH J
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:This invention relates generally to short-wavelength radiation from laser-produced and discharged produced plasmas, and more particularly to efficient systems and methods for obtaining short-wavelength radiation.