High-efficiency, low-debris short-wavelength light sources
This invention relates generally to short-wavelength radiation from laser-produced and discharged produced plasmas, and more particularly to efficient systems and methods for obtaining short-wavelength radiation.
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | This invention relates generally to short-wavelength radiation from laser-produced and discharged produced plasmas, and more particularly to efficient systems and methods for obtaining short-wavelength radiation. |
---|