EVAPORATION TUBE AND EVAPORATION APPARATUS WITH ADAPTED EVAPORATION CHARACTERISTIC
An evaporation crucible is described. The evaporation crucible includes: an electrically conductive chamber tube ( 120 ) having a wall such that an enclosure is formed, the chamber tube having a tube axis; a first electrical connection ( 162; 182 ); a second electrical connection; at least one feedi...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An evaporation crucible is described. The evaporation crucible includes: an electrically conductive chamber tube ( 120 ) having a wall such that an enclosure is formed, the chamber tube having a tube axis; a first electrical connection ( 162; 182 ); a second electrical connection; at least one feeding opening ( 134 ); and at least one distributor orifice ( 170; 470; 670 ) of the chamber tube, wherein the enclosure includes a melting-evaporation area. |
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