Device For Introducing Reaction Gases Into A Reaction Chamber And Epitaxial Reactor Which Uses Said Device

The present invention relates to a device ( 1 ) for introducing reaction gases into a reaction chamber of an epitaxial reactor; the device ( 1 ) comprises a gas supply pipe ( 2 ) and a cooling member ( 3 ) situated at one end of the supply pipe ( 2 ) and able to cool the supply pipe ( 2 ) and thereb...

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Bibliographische Detailangaben
Hauptverfasser:	SPECIALE NATALE, POZZETTI VITTORIO, VALENTE GIANLUCA, PRETI FRANCO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The present invention relates to a device ( 1 ) for introducing reaction gases into a reaction chamber of an epitaxial reactor; the device ( 1 ) comprises a gas supply pipe ( 2 ) and a cooling member ( 3 ) situated at one end of the supply pipe ( 2 ) and able to cool the supply pipe ( 2 ) and thereby the gas flowing inside it.