Test gas leak detection using a composite membrane

A leak detector includes a leak detector inlet to receive a test gas; a vacuum pump coupled to the leak detector inlet; a test gas sensing unit connected through a passage to the leak detector inlet; and a membrane that is permeable to the test gas disposed in the passage between the leak detector i...

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Bibliographische Detailangaben
1. Verfasser:	LIEPERT ANTHONY G
Format:	Patent
Sprache:	eng
Schlagworte:	COMBINED OPERATIONS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MACHINE TOOLS MEASURING METAL-WORKING NOT OTHERWISE PROVIDED FOR OTHER WORKING OF METAL PERFORMING OPERATIONS PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR TRANSPORTING UNIVERSAL MACHINE TOOLS
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Beschreibung
Zusammenfassung:	A leak detector includes a leak detector inlet to receive a test gas; a vacuum pump coupled to the leak detector inlet; a test gas sensing unit connected through a passage to the leak detector inlet; and a membrane that is permeable to the test gas disposed in the passage between the leak detector inlet and the test gas sensing unit, the membrane having a permeance to the test gas that varies by less than five percent over a temperature range of T0-20 K to T0+20 K, where T0 is a design temperature. In addition, methods are provided for making a composite membrane that includes a semi-permeable membrane and a porous membrane. Furthermore, a reference leak, which includes a composite membrane is provided.