METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE

METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE

Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.

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Bibliographische Detailangaben
Hauptverfasser: MITCHELL DONALD W, BORZIO JOHN P, BOURASSEAU CYRIL, ZHOU DERONG, XU MINDI, MONCUR THOMAS K, JURSICH GREGORY M
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Beschreibung
Zusammenfassung:Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.