Processing Method of Fine Structure and Processing Equipment for Fine Structure

In a processing method of a fine structure according to the present invention, an opposed platen ( 211 )is moved from a retreat position to a molding/processing position, so that a film ( 1 ) is pressed against a mold ( 5 ) and processed. Thereafter a second block ( 211 b) is separated from a first...

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Bibliographische Detailangaben
Hauptverfasser:	MIKAGE KATSUNARI, YORITA JUN
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	In a processing method of a fine structure according to the present invention, an opposed platen ( 211 )is moved from a retreat position to a molding/processing position, so that a film ( 1 ) is pressed against a mold ( 5 ) and processed. Thereafter a second block ( 211 b) is separated from a first block ( 211 a). Thus, improvement of the cooling rate for the opposed platen ( 211 ) can be attained by reducing the total thermal capacity of the opposed platen ( 211 ) by reducing the volume of the opposed platen ( 211 ) in cooling and physically discharging heat stored in the opposed platen ( 211 ). Thus, cooling efficiency for the opposed platen ( 211 ) is improved, and the heat cycle of the opposed platen ( 211 ) can be reduced.