COMPLIANT SUBSTRATE HOLDING ASSEMBLY

Methods and apparatus for holding substrate in a compliant substrate holding assembly are provided. In one embodiment, an apparatus for a compliant substrate holding assembly includes a base plate, a finger disposed on the base plate having a V-shaped slot formed thereon, and two arms disposed on op...

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Bibliographische Detailangaben
Hauptverfasser:	SENN ANTHONY J, LESTER PAUL E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Methods and apparatus for holding substrate in a compliant substrate holding assembly are provided. In one embodiment, an apparatus for a compliant substrate holding assembly includes a base plate, a finger disposed on the base plate having a V-shaped slot formed thereon, and two arms disposed on opposite ends of the base plate and each arm having V-shaped slot formed therein. In another embodiment, a method for holding a substrate on a compliant substrate holding assembly includes inserting a substrate into a holding assembly having at least three substrate supporting members and detecting a change in position of one of the substrate supporting structures.