Electron Microscope and Combined Illumination Lens

An object of the present invention is to provide an electron microscope that employs a hologram of a diffraction pattern to reconstruct a microscopic image involving no imaging aberration due to image forming lenses, as well as a combined illumination lens used for such an electron microscope. The e...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TSUNO KATSUSHIGE, ENDOH HISAMITSU, ACHIHARA MASATO, OIKAWA TETSUO
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An object of the present invention is to provide an electron microscope that employs a hologram of a diffraction pattern to reconstruct a microscopic image involving no imaging aberration due to image forming lenses, as well as a combined illumination lens used for such an electron microscope. The electron microscope according to the present invention has an electron source ( 11 ), a condenser lens ( 12 ), a biprism ( 13 ) to split an electron beam supplied from the condenser lens ( 12 ) into coherent first and second electron beams (L 1 , L 2 ) that are parallel to each other, a combined illumination lens ( 15 ) to make the first electron beam (L 1 ) into a parallel wave and the second electron beam (L 2 ) into a converging wave that converges at a predetermined distance, a sample stage ( 16 ) to hold a sample illuminated with the first electron beam (L 1 ), a detector ( 17 ) to detect a hologram of a diffraction pattern formed by interference of the first electron beam (L 1 ) with the second electron beam (L 2 ), a computing unit ( 18 ) to conduct a predetermined Fourier transform on the hologram supplied from the detector ( 17 ) and reconstruct a microscopic image of the sample, and a display ( 19 ) to display the reconstructed microscopic image.