SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING
A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
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| creator | KILEY CHRISTOPHER C BUZAN FORREST T |
| description | A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2008145194A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2008145194A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2008145194A13</originalsourceid><addsrcrecordid>eNrjZNAJdvUL9g9ScAwKcvRzd_V19QsJVnADCoQ7urkGKTgD-UDKzdPPxdPPnYeBNS0xpziVF0pzMyi7uYY4e-imFuTHpxYXJCan5qWWxIcGGxkYWBiamBpamjgaGhOnCgAz1SYo</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING</title><source>esp@cenet</source><creator>KILEY CHRISTOPHER C ; BUZAN FORREST T</creator><creatorcontrib>KILEY CHRISTOPHER C ; BUZAN FORREST T</creatorcontrib><description>A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; PICTORIAL COMMUNICATION, e.g. TELEVISION ; SEMICONDUCTOR DEVICES</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080619&DB=EPODOC&CC=US&NR=2008145194A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080619&DB=EPODOC&CC=US&NR=2008145194A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KILEY CHRISTOPHER C</creatorcontrib><creatorcontrib>BUZAN FORREST T</creatorcontrib><title>SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING</title><description>A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC COMMUNICATION TECHNIQUE</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PICTORIAL COMMUNICATION, e.g. TELEVISION</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNAJdvUL9g9ScAwKcvRzd_V19QsJVnADCoQ7urkGKTgD-UDKzdPPxdPPnYeBNS0xpziVF0pzMyi7uYY4e-imFuTHpxYXJCan5qWWxIcGGxkYWBiamBpamjgaGhOnCgAz1SYo</recordid><startdate>20080619</startdate><enddate>20080619</enddate><creator>KILEY CHRISTOPHER C</creator><creator>BUZAN FORREST T</creator><scope>EVB</scope></search><sort><creationdate>20080619</creationdate><title>SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING</title><author>KILEY CHRISTOPHER C ; BUZAN FORREST T</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2008145194A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2008</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC COMMUNICATION TECHNIQUE</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PICTORIAL COMMUNICATION, e.g. TELEVISION</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>KILEY CHRISTOPHER C</creatorcontrib><creatorcontrib>BUZAN FORREST T</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KILEY CHRISTOPHER C</au><au>BUZAN FORREST T</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING</title><date>2008-06-19</date><risdate>2008</risdate><abstract>A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
| recordid | cdi_epo_espacenet_US2008145194A1 |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES |
| title | SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-05T00%3A35%3A18IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KILEY%20CHRISTOPHER%20C&rft.date=2008-06-19&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2008145194A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |