SENSOR ARRANGEMENTS FOR WAFER CENTER FINDING

A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.

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Bibliographische Detailangaben
Hauptverfasser:	KILEY CHRISTOPHER C, BUZAN FORREST T
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.