Microfabricated ultrasonic transducers with curvature and method for making the same

The present invention provides a microfabricated ultrasonic transducer with curvature. The curvature is made possible by thinning the substrate such that it is flexible enough to be mounted on an assembly with the desired curvature. In one aspect of the invention, the substrate can contain electroni...

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Hauptverfasser: MASLAK SAMUEL H, LADABAUM IGAL
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creator MASLAK SAMUEL H
LADABAUM IGAL
description The present invention provides a microfabricated ultrasonic transducer with curvature. The curvature is made possible by thinning the substrate such that it is flexible enough to be mounted on an assembly with the desired curvature. In one aspect of the invention, the substrate can contain electronic circuits. In another aspect, the assembly mounting can incorporate curved damping materials that serve to remove undesirable substrate modes.
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subjects CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DEAF-AID SETS
DYNAMO-ELECTRIC MACHINES
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
GENERATION
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
PUBLIC ADDRESS SYSTEMS
title Microfabricated ultrasonic transducers with curvature and method for making the same
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