Microfabricated ultrasonic transducers with curvature and method for making the same

The present invention provides a microfabricated ultrasonic transducer with curvature. The curvature is made possible by thinning the substrate such that it is flexible enough to be mounted on an assembly with the desired curvature. In one aspect of the invention, the substrate can contain electroni...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MASLAK SAMUEL H, LADABAUM IGAL
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DEAF-AID SETS DYNAMO-ELECTRIC MACHINES ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY GENERATION LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS
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Beschreibung
Zusammenfassung:	The present invention provides a microfabricated ultrasonic transducer with curvature. The curvature is made possible by thinning the substrate such that it is flexible enough to be mounted on an assembly with the desired curvature. In one aspect of the invention, the substrate can contain electronic circuits. In another aspect, the assembly mounting can incorporate curved damping materials that serve to remove undesirable substrate modes.