Inspection systems and methods

Inspection systems and methods are disclosed. A preferred embodiment comprises an inspection system including a support for a reticle and a microscope including a lens system. The lens system includes at least one lens comprising at least one Fresnel element, wherein the at least one Fresnel element...

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Bibliographische Detailangaben
1. Verfasser:	GOODWIN FRANCIS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	Inspection systems and methods are disclosed. A preferred embodiment comprises an inspection system including a support for a reticle and a microscope including a lens system. The lens system includes at least one lens comprising at least one Fresnel element, wherein the at least one Fresnel element is non-circular.