MEMS filter module with multi-level filter traps

A MEMS flow module ( 340 ) includes a plurality of filtering sections ( 344 ). Each filtering section ( 344 ) is defined by a stack ( 342 ) of a plurality of layers ( 346, 348, 350, 352 ). Each filtering section ( 344 ) includes at least one filter trap ( 364, 368 ) at each of at least two different...

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Bibliographische Detailangaben
1. Verfasser:	RODGERS M. STEVEN
Format:	Patent
Sprache:	eng
Schlagworte:	BANDAGES, DRESSINGS OR ABSORBENT PADS DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF,TUBULAR STRUCTURES OF THE BODY, E.G. STENTS FILTERS IMPLANTABLE INTO BLOOD VESSELS FIRST-AID KITS FOMENTATION HUMAN NECESSITIES HYGIENE MEDICAL OR VETERINARY SCIENCE ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES PROSTHESES TREATMENT OR PROTECTION OF EYES OR EARS
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Beschreibung
Zusammenfassung:	A MEMS flow module ( 340 ) includes a plurality of filtering sections ( 344 ). Each filtering section ( 344 ) is defined by a stack ( 342 ) of a plurality of layers ( 346, 348, 350, 352 ). Each filtering section ( 344 ) includes at least one filter trap ( 364, 368 ) at each of at least two different levels or elevations within the stack ( 342 ). This provides for an increased flow rate through the MEMS flow module ( 340 ).