METHOD OF MAKING A VARIABLE RESISTANCE MEMORY

A method of making a variable resistance material (VRM), the method comprising providing a precursor comprising a metallorganic or organometallic solvent containing a metal moiety suitable for forming the VRM, depositing the precursor on a substrate to form a thin film of the precursor, and heating...

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Bibliographische Detailangaben
Hauptverfasser: CELINSKA JOLANTA, BRUBAKER MATTHEW D, PAZ DE ARAUJO CARLOS A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of making a variable resistance material (VRM), the method comprising providing a precursor comprising a metallorganic or organometallic solvent containing a metal moiety suitable for forming the VRM, depositing the precursor on a substrate to form a thin film of the precursor, and heating the thin film to form the VRM. The preferred solvent comprises octane.