Method and semiconductor structure for reliability characterization
According to one exemplary embodiment, a method for characterizing a reliability of a semiconductor structure includes forming a recess in a first dielectric layer in the semiconductor structure; filling the recess with a sacrificial material; removing the sacrificial material thereby causing an int...
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Sprache: | eng |
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Zusammenfassung: | According to one exemplary embodiment, a method for characterizing a reliability of a semiconductor structure includes forming a recess in a first dielectric layer in the semiconductor structure; filling the recess with a sacrificial material; removing the sacrificial material thereby causing an intentional defect with known characteristics to aid in a characterizing the reliability of the semiconductor structure. |
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