Method Of Sensing An Amount Of Moisture On A Surface Of A Substrate With Temperature Compensation

A method for determining an amount of moisture on a surface of a substrate includes a step of transmitting a transmitter signal to generate a wave. The transmitter signal has a first phase. The wave is propagated to vibrate the surface. Vibrations in the surface are detected and converted into a rec...

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Bibliographische Detailangaben
Hauptverfasser: PANKEY BRENT W, GROSH KARL, BYRNE COLIN J, ROHDE MITCHELL MAX
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for determining an amount of moisture on a surface of a substrate includes a step of transmitting a transmitter signal to generate a wave. The transmitter signal has a first phase. The wave is propagated to vibrate the surface. Vibrations in the surface are detected and converted into a receiver signal. The receiver signal has a second phase different than the first phase. The method includes the step of sensing the temperature of the substrate. The amount of moisture on the surface is computed based on a phase shift between the transmitter signal and the receiver signal that has been compensated to account for surface temperature.