Method Of Sensing An Amount Of Moisture On A Surface Of A Substrate With Temperature Compensation
A method for determining an amount of moisture on a surface of a substrate includes a step of transmitting a transmitter signal to generate a wave. The transmitter signal has a first phase. The wave is propagated to vibrate the surface. Vibrations in the surface are detected and converted into a rec...
Gespeichert in:
Hauptverfasser: | , , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A method for determining an amount of moisture on a surface of a substrate includes a step of transmitting a transmitter signal to generate a wave. The transmitter signal has a first phase. The wave is propagated to vibrate the surface. Vibrations in the surface are detected and converted into a receiver signal. The receiver signal has a second phase different than the first phase. The method includes the step of sensing the temperature of the substrate. The amount of moisture on the surface is computed based on a phase shift between the transmitter signal and the receiver signal that has been compensated to account for surface temperature. |
---|