PATTERNED ATOMIC LAYER EPITAXY

A patterned layer is formed by removing nanoscale passivating particle from a first plurality of nanoscale structural particles or by adding nanoscale passivating particles to the first plurality of nanoscale structural particles. Each of a second plurality of nanoscale structural particles is depos...

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Bibliographische Detailangaben
Hauptverfasser: STALLCUP RICHARD E.II, SKIDMORE GEORGE D, RANDALL JOHN N, BAUR CHRISTOF, FOLARON ROBERT J, PENG JINGPING, LIU JUN-FU
Format: Patent
Sprache:eng
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Zusammenfassung:A patterned layer is formed by removing nanoscale passivating particle from a first plurality of nanoscale structural particles or by adding nanoscale passivating particles to the first plurality of nanoscale structural particles. Each of a second plurality of nanoscale structural particles is deposited on each of corresponding ones of the first plurality of nanoscale structural particles that is not passivated by one of the plurality of nanoscale passivating particles.