Purge gas unit and purge gas supply integrated unit

To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface...

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Bibliographische Detailangaben
Hauptverfasser: INAGAKI TAKEYA, MORI YOJI, SUGINO AKIHITO, OKABE TSUNEYUKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.