Measurement of test object with stacked features

Measurement of test object with stacked features

An apparatus and associated method for measuring spatial characteristics of a test object with stacked features. First and second measurement assemblies for measuring opposing first and second planar features, respectively, of a test object, by directing light beams into a gap between the features t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SMITH RONALD JACOB, NAYAR SHAM SUNDER, FAHRENDORFF MARK CURTIS, SILEWSKI SHAWN STEPHEN, GEROGEORGE JOHN GEORGE
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:An apparatus and associated method for measuring spatial characteristics of a test object with stacked features. First and second measurement assemblies for measuring opposing first and second planar features, respectively, of a test object, by directing light beams into a gap between the features to measure a position and a static attitude of each feature.