TITANIUM SEMICONDUCTOR BRIDGE IGNITER
A titanium semiconductor bridge igniter ( 10, 10 ') has a substrate ( 12, 12 ') on which is carried a pair of spaced-apart pads ( 18 a, 18 b) connected by a bridge ( 20 ). The pads ( 18 a, 18 b) and bridge ( 20 ) are made of a layer of polysilicon ( 22 ) or crystalline silicon ( 22 ')...
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Zusammenfassung: | A titanium semiconductor bridge igniter ( 10, 10 ') has a substrate ( 12, 12 ') on which is carried a pair of spaced-apart pads ( 18 a, 18 b) connected by a bridge ( 20 ). The pads ( 18 a, 18 b) and bridge ( 20 ) are made of a layer of polysilicon ( 22 ) or crystalline silicon ( 22 ') covered by a layer of titanium ( 24 ). Metal lands ( 26 a, 26 b) overlie the pads ( 18 a, 18 b) but leave the bridge ( 20 ) exposed so that it can be placed in contact with an energetic material charge ( 42 ). A method of stabilizing the titanium semiconductor bridge igniter ( 10, 10 ') against temperature-induced variations in electrical resistance of bridge ( 20 ) includes heating the titanium semiconductor bridge igniter ( 10, 10 ') to an elevated temperature, e.g., from about 37° C. to about 250° C. |
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