METHODS AND APPARATUS FOR PFC ABATEMENT USING A CDO CHAMBER

In some aspects, an apparatus is provided for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber. The apparatus includes (1) a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalys...

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Hauptverfasser: MCINTOSH MONIQUE, FOX ALLEN, TSU STEPHEN, VERMEULEN ROBBERT M, LEE POH S, LIN KUON, RAOUX SEBASTIEN, CLARK DANIEL O, PUTZ JOSHUA, RIESKE ERIC, MOALEM MEHRAN
Format: Patent
Sprache:eng
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Zusammenfassung:In some aspects, an apparatus is provided for abating perfluorocarbons (PFCs) in a controlled decomposition oxidation (CDO) thermal reaction chamber. The apparatus includes (1) a cartridge insertable into the thermal reaction chamber having gas-permeable first and second ends and including a catalyst material; and (2) thermally-conductive fixtures positioned within the cartridge. Numerous other aspects are provided.