METHOD OF MAKING AND APPARATUS HAVING POLISHING PAD WITH WINDOW

A polishing layer of a polishing has a window member with a top surface positioned a predetermined distance below the polishing surface. A transparent layer can be positioned below the polishing layer arid supporting the window member.

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Bibliographische Detailangaben
Hauptverfasser:	WISWESSER ANDREAS N, OSHANA RAMIEL, HUGHES KERRY F, BENVEGNU DOMINIC J, HUO DAVID D, ROHDE JAY
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING
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Beschreibung
Zusammenfassung:	A polishing layer of a polishing has a window member with a top surface positioned a predetermined distance below the polishing surface. A transparent layer can be positioned below the polishing layer arid supporting the window member.