XY STAGE

Disclosed is an XY stage comprising a moving table, a first guide mechanism to guide the moving table in a predetermined direction, a moving body mounted to the moving table, a second guide mechanism to guide the moving body in a direction intersecting with a guiding direction of the first guide mec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	NAITO YOSHINAO
Format:	Patent
Sprache:	eng
Schlagworte:	CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR CONTROL DEVICES OR SYSTEMS INSOFAR AS CHARACTERISED BYMECHANICAL FEATURES ONLY CONTROLLING GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INSTRUMENT DETAILS PHYSICS REGULATING TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Beschreibung
Zusammenfassung:	Disclosed is an XY stage comprising a moving table, a first guide mechanism to guide the moving table in a predetermined direction, a moving body mounted to the moving table, a second guide mechanism to guide the moving body in a direction intersecting with a guiding direction of the first guide mechanism with respect to the moving table, a drive mechanism to drive the moving table in the guiding direction of the first guide mechanism, and a converting mechanism to convert motion of the moving table in the guiding direction of the first guide mechanism into motion of the moving body in a guiding direction of the second guide mechanism.