Production Method of Organic El Device and Cleaning Method of Organic El Device Production Apparatus

The object of the present invention is to provide a method of stably producing a high quality organic EL device by surely avoiding adverse influence due to organic matters and the like when an organic layer is formed on a surface of, for example, a substrate having an anode formed thereon. The means...

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Bibliographische Detailangaben
Hauptverfasser:	IGARASHI TAKESHI, NISHINOBO YASUKI, YAMADA KAZUO, SAKASEGAWA KOICHI, IRISAWA OSAMU, OTOMO MASAHIKO, TAKAHASI NATSUKI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The object of the present invention is to provide a method of stably producing a high quality organic EL device by surely avoiding adverse influence due to organic matters and the like when an organic layer is formed on a surface of, for example, a substrate having an anode formed thereon. The means for resolution is characterized in that the inside of an organic EL device production apparatus equipped with an organic film-forming chamber for forming an organic layer on a surface of, for example, a substrate having an anode formed thereon is cleaned with an ozone gas, and the organic layer is then formed.