SYSTEMS AND METHODS FOR CREATING MEMS GYROS

Methods and systems for creating microelectromechanical system (MEMS) gyros. The methods and systems include generating a map of motor bias and creating MEMS gyros based on the map of motor bias to achieve a higher yield of usable MEMS gyros per wafer. The systems include a processor with components...

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Hauptverfasser: DWYER PAUL W, COUSSEAU PETER L
Format: Patent
Sprache:eng
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Zusammenfassung:Methods and systems for creating microelectromechanical system (MEMS) gyros. The methods and systems include generating a map of motor bias and creating MEMS gyros based on the map of motor bias to achieve a higher yield of usable MEMS gyros per wafer. The systems include a processor with components configured to determine paths of optimal motor bias for a given deep reactive ion etcher on a wafer, a stepper for imprinting a pattern for each gyro in an orientation that corresponds to the path of optimal motor bias each gyro is calculated to be most near on the wafer, and a deep reactive ion etcher to etch the gyros in the wafer.