System and method for producing a semiconductor circuit arrangement

Method and systems for producing a semiconductor circuit arrangement are disclosed. In one implementation, after a formation of a first electrically conductive layer at the surface of a semiconductor substrate for the purpose of realizing a base connection layer and a first split gate layer, an impl...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WAGNER CAJETAN, TILKE ARMIN, ROCHEL MARKUS
Format: Patent
Sprache:eng
Schlagworte:
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