DEVICE FOR INSPECTING A MICROSCOPIC COMPONENT BY MEANS OF AN IMMERSION OBJECTIVE

A device ( 1 ) is disclosed for inspecting, measuring defined structures, simulating structures and structural defects, repair of and to structures, and post-inspecting defined object sites on a microscopic component ( 2 ) with an immersion objective ( 8 a). The device ( 1 ) comprises a stage that is movable in the x-coordinate direction and in the y-coordinate direction and a holder ( 42 ) for the microscopic component ( 2 ), whereby the holder ( 42 ) is placed on the stage ( 4 ) with the microscopic component ( 2 ) in it. The holder ( 42 ) has a reservoir ( 51 a) with immersion or cleaning fluid, respectively. The stage ( 4 ) is movable such that the immersion objective ( 8 a) is located directly above the reservoir ( 51 a) and may dip into the fluid with its front-most lens.