Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation
The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container h...
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| creator | BONNESS ANJA EGGERS KARIN KUBART GREGOR FRANGEN ANDREAS HOCKE CHRISTOPH CHOUDHURY MARCEL KELLER WOLFGANG NOELSCHER CHRISTOPH HUNGER RUEDIGER ROESNER MICHAEL KALLIS NORBERT LERING MICHAEL |
| description | The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation. |
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A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation.</description><language>eng</language><subject>ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR ; APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS ; CONVEYING ; ELECTROGRAPHY ; HANDLING THIN OR FILAMENTARY MATERIAL ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PACKAGES ; PACKAGING ELEMENTS ; PACKING ; PERFORMING OPERATIONS ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; STORING ; TRANSPORTING</subject><creationdate>2007</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070816&DB=EPODOC&CC=US&NR=2007187272A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25569,76552</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070816&DB=EPODOC&CC=US&NR=2007187272A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BONNESS ANJA</creatorcontrib><creatorcontrib>EGGERS KARIN</creatorcontrib><creatorcontrib>KUBART GREGOR</creatorcontrib><creatorcontrib>FRANGEN ANDREAS</creatorcontrib><creatorcontrib>HOCKE CHRISTOPH</creatorcontrib><creatorcontrib>CHOUDHURY MARCEL</creatorcontrib><creatorcontrib>KELLER WOLFGANG</creatorcontrib><creatorcontrib>NOELSCHER CHRISTOPH</creatorcontrib><creatorcontrib>HUNGER RUEDIGER</creatorcontrib><creatorcontrib>ROESNER MICHAEL</creatorcontrib><creatorcontrib>KALLIS NORBERT</creatorcontrib><creatorcontrib>LERING MICHAEL</creatorcontrib><title>Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation</title><description>The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. 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A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS STORING TRANSPORTING |
| title | Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation |
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