Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation

The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container h...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BONNESS ANJA, EGGERS KARIN, KUBART GREGOR, FRANGEN ANDREAS, HOCKE CHRISTOPH, CHOUDHURY MARCEL, KELLER WOLFGANG, NOELSCHER CHRISTOPH, HUNGER RUEDIGER, ROESNER MICHAEL, KALLIS NORBERT, LERING MICHAEL
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a device for the storage of at least one photomask for lithographic projection and a method for using the device in an exposure installation. A container is suitable for receiving a photomask. The container has a housing, a closable opening device situated at the container housing and serving for the entry and issuing of the photomask, and one gas inlet opening arranged to purge the photomask. The invention also relates to a method for using the device in an exposure installation.