Method Of Determining Photomask Inspection Capabilities

A method of and article for determining photomask inspection capabilities. The article comprises a photomask having a first array of a plurality of test pattern shapes that include ordered variations of a first shape variable, from a largest to a smallest dimension, and a second array of a plurality of test pattern shapes, that include the ordered variations of the first shape variable and further include ordered variations of a second shape variable, from a largest to a smallest dimension. The method includes inspecting the first array of test pattern shapes of the photomask in order of the variations of the first shape variable. If at least two consecutive first test pattern shapes in the first array fail an inspection criteria, the failed consecutive first test pattern shapes are marked as failed. The method then includes marking for inspection in the second array of test pattern shapes of the photomask those shapes having first shape variables in the vicinity of those of the failed consecutive first test pattern shapes, and inspecting the marked second array of test pattern shapes in order of the variations of the first shape variable. If at least two consecutive second test pattern shapes of the marked second array test pattern shapes fail an inspection criteria, the failed consecutive second test pattern shapes are marked as failed.