Method for the production of hsicl3 by catalytic hydrodehalogenation of sicl4

The invention relates to a process for the catalytic hydrodehalogenation of SiCl4 to form HSiCl3, which comprises bringing a gaseous feed mixture comprising hydrogen and silicon tetrachloride into direct contact with at least one heating element of a resistance heating device, with the heating eleme...

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Bibliographische Detailangaben
Hauptverfasser: BOHMHAMMEL KLAUS, ROVER INGO, KOTHER SVEN, HONE HANS-JURGEN, ROEWER GERHARD, MONKIEWICZ JAROSLAW
Format: Patent
Sprache:eng
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Zusammenfassung:The invention relates to a process for the catalytic hydrodehalogenation of SiCl4 to form HSiCl3, which comprises bringing a gaseous feed mixture comprising hydrogen and silicon tetrachloride into direct contact with at least one heating element of a resistance heating device, with the heating element being composed of a metal or a metal alloy and being heated to carry out the reaction.