Method for reducing the surface roughness of a thin layer of conductive oxides

Method for reducing the surface roughness of a thin layer of conductive oxides

A method for reducing the surface roughness of thin layers of conductive oxides for thin-layer opto-electronic devices envisages polishing with a finishing cloth and an abrasive compound, which has a basic pH and contains silica particles.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: VIRGILI DALIA, FATTORI VALERIA, COCCHI MASSIMO, GIRO GABRIELE, GARULLI ALBERTO, DI MARCO PIERGIULIO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A method for reducing the surface roughness of thin layers of conductive oxides for thin-layer opto-electronic devices envisages polishing with a finishing cloth and an abrasive compound, which has a basic pH and contains silica particles.